Cross coupling in parallel kinematic MEMS nanopositioners
- Creator: Maroufi, Mohammad , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2016
Feedback-controlled MEMS force sensor for characterization of microcantilevers
- Creator: Moore, Steven Ian , Coskun, M. Bulut , Alan, Tuncay , Neild, Adrian , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2015
Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
- Creator: Fowler, Anthony G. , Maroufi, Mohammad , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015
Parallel averaging for thermal noise mitigation in MEMS electrothermal displacement sensors
- Creator: Mohammadi, Ali , Moheimani, S. O. R. , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2015
Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner
- Creator: Bazaei, Ali , Fowler, Anthony G. , Maroufi, Mohammad , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2015
Vibration control with MEMS electrostatic drives: a self-sensing approach
- Creator: Moore, Steven Ian , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015
Design and analysis of novel microelectromechanical systems for energy harvesting and nanopositioning applications
- Creator: Fowler, Anthony
- Resource Type: thesis
- Date: 2014
Displacement measurement with a self-sensing MEMS electrostatic drive
- Creator: Moore, Steven I. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
MEMS nanopositioner for Lissajous-scan atomic force microscopy
- Creator: Fowler, Anthony G. , Maroufi, Mohammad , Bazaei, Ali , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2014
Zero displacement microelectromechanical force sensor using feedback control
- Creator: Coskun, M. Bulut , Moore, Steven , Moheimani, S. O. Reza , Neild, Adrian , Alan, Tuncay
- Resource Type: journal article
- Date: 2014
A low-flicker-noise MEMS electrothermal displacement sensing technique
- Creator: Mohammadi, A. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
Frequency modulation technique for MEMS resistive sensing
- Creator: Mohammadi, Ali , Yuce, Mehmet Rasit , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2012
A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
- Creator: Ji, Lujun , Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: conference paper
- Date: 2010